The JEOL JSM-7800F LV scanning electron microscope is a device with a FEG source.

It combines sub-nanometric spatial resolution, nanoscale analytical capabilities in EDX and the possibility of working in low-pressure conditions.

  • Schottky in lens thermally assisted field emission gun that provides <1% current stability over 12 hours.
  • Acceleration voltage from 10 V to 30 kV.
  • Possibility to work with in low pressure condition varying from 10 to 300 Pa (LV mode "Low Vaccum").
  • Continuous probe current from 1 pA to 500 nA.
  • Magnification from x1 to x1,000,000.
  • Spatial resolution: 0.8 nm at 15 kV, 1.2 nm at 1 kV and 1.5 nm at 15 kV at 50 Pa of pressure in the chamber.
  • Possible observation of 100 mm diameter and 40 mm high samples.
  • Secondary and backscattered electron detectors in the chamber, in-lens and low-vaccum mode.
  • Observation system for thin samples in transmission mode (STEM).
  • Oxford Instruments EDS / EBSD coupled system EDS / EBSD (80 mm² SDD spectrometer and HKl Nordlys Max² EBSD camera), which also enables thin-sample EBSD (TKD) analysis.